Does anyone have a data sheet for Shipley 1818 photoresist? I would like
to get information about the spin speed v/s thickness and exposure
energy v/s film thickness etc. Any information in this regard will be
appreciated. Thank you.

Yeswanth L Rao
Graduate Research Assistant
Micro/Nano Fabrication Laboratory
Driftmier Engineering Center
University of Georgia
Athens, GA 30602
E-mail: [email protected]