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MEMSnet Home: MEMS-Talk: Backside Oxidation remove for DRIE
AlN dry etching
2004-07-19
Yeswanth Rao
2004-07-20
William Lanford-Crick
2004-07-20
Kamal Yadav
Intellisense Doubt :)
2004-07-20
Sudhanshu Garg
Backside Oxidation remove for DRIE
2004-07-21
Z.,W.Y.(Lydia)
2004-07-21
[email protected]
Backside Oxidation remove for DRIE
Z.,W.Y.(Lydia)
2004-07-21
Dear all,

I oxidized silicon (1 micron)for DRIE. Do I have to remove the sio2 at the
backside? or it does not matter?

Thanks,

Lydia

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