Hi Amandine,

I've been using a polyimide which goes away with positive resist developer
and is resistant to solvents. It does not behave like conventional
polyimides but is associated with aromatic polyimides which makes is soluble
even after hard bake in develper(positive resist developer).

It does work good with me. Let me know if you think its suitable for your
application - I can send you the application sheet and the other
information.

Regards,

Aasutosh Dave

>From: "Amandine KUBIE" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] a positive resist
>Date: Tue, 20 Jul 2004 08:36:03 GMT
>
>Hello,
>
>I am looking for a resist, preferably a positive one, that I can use as
>sacrifical layer.
>
>The main problem is that the layer used over is made with a solvent that
>can attack this sacrifical layer.
>
>I already proved some of positive resists like AZ 4562, HPR 504, P100,
>P1275 but also some negative resists like PL125, SC resist.
>
>The positive resists are attacked by the solvent.
>It happened that with negative resists, there is a good compatibility
>with the solvent but the main problem is that these negative resists are
>very hard to clean.
>
>If you have an idea of a positive, solvent-resistant, resist that I can
>try, I would be very thankful of your help.
>
>Best Regards,
>
>Amandine KUBIE
>
>
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