Dear MEMS colleagues,

I'm having difficulties removing the high vacuum grease.
High vacuum grease is used in attaching small samples to a dummy wafer for Si
deep etch process.
After the deep etch process, I managed to detach the samples in acetone,
but totally removing the grease with acetone seems impossible.
Can anyone shed some light on?
I'm using Dow corning high vacuum grease.

Regards.

Ji.