Linas

Generally deep REI or other special processes are involved in defining
structures that are substantial in Z such as a 400 micron structure on a 525
micron wafer when most people talk about 3D MEMS. However I would offer up
another view and say that any MEMS whose designed motion includes
intentional excursions in x,y and z is a 3D MEMS regardless of the structure
shape or size.

Vic Kley


----- Original Message -----
From: "Jauniskis, Linas" 
To: 
Sent: Wednesday, July 21, 2004 12:36 PM
Subject: [mems-talk] 3D vs 2D MEMS


> I am doing some background research and haven't found a clear
> explanation of the design difference between 2D and 3D MEMS.
>
> Can anyone offer an explanation or provide a link with one?
>
> Thanks,
> L.
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