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MEMSnet Home: MEMS-Talk: wet oxidation od silicon
wet oxidation od silicon
2004-07-26
Stephan Biber
wet oxidation od silicon
Stephan Biber
2004-07-26
Hey there,

Does anyone have a simple recipe for wet chemical oxication of silicon?
 I want to grow a thin layer of SiO2 on silicon to enhance metal
adhesion properties before sputtering.

Best regards,

Stephan

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