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MEMSnet Home: MEMS-Talk: Re: 6-inch Oxide CVD capabilities?
Re: 6-inch Oxide CVD capabilities?
1998-11-17
Sami Lähteenmäki
Re: 6-inch Oxide CVD capabilities?
Sami Lähteenmäki
1998-11-17
Cheers!

Okmetic Ltd., Finland, is the leading manufacturer for double-side polished
6-inch wafers.
They have many possibilities.

OKMETIC LTD.
Sinimaentie 12
FIN-02630 Espoo
Finland

Phone:358- 9- 502-800 Fax:358-9-5028-0300

Regards,

Sami
-----------------------------

>>> "Kevin A. Shaw"  11/02 7:26 pm >>>
Hello,
        I'm searching for any fabs (academic or commercial) that would be able
to
deposit oxide on 6-inch wafers.  I would prefer a conformal, low temperature
(<450C) CVD oxide; the wafers will have been metallized with aluminum.  We
will likely have quite a few wafers that will need deposition (50-100).
        Any recommendations would be greatly appreciated.

                        Thanks,

                        Kevin Shaw


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