Hi,

Can anyone help me in finding

1) the best recipe for the wet etch for Platinum which
can stand standard  photoresist (AZ 4330).

2)Also, I want to create some rectangular shape
(1mmx1mm) cavities of about 20 microns deep. Can
anyone help me in this regard too. I've on my one
wafer devices with metal combinations Pt/Ti and on
other wafer devices Pt/Cr and third wafer with Ti/Cr.
Will it be feasible to create cavities before or after
fab process. Any suggestions will be appreciated.

imran
[email protected]
Grad Student




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