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MEMSnet Home: MEMS-Talk: need help on making pyramid array on the ceramic thick film
need help on making pyramid array on the ceramic thick film
2004-07-26
WENYI ZHU
need help on making pyramid array on the ceramic thick film
WENYI ZHU
2004-07-26
Dear all,
I am trying to make some pyramid array on the ceramic thick film about 25
micrometers to 100 micrometer thick.I found a method  called anisotropic
etching in KOH can make pyramid cavity on the  <100> single crystal si
wafer,but my etching object is isotropical ceramics,for example BST(Barium
strontium titanate).It is a kind of polycrystal material.Is there any other
method to make these pyramids in such fine scale?
You will be highly appreciated you if you can give me any suggestions.
Thanks a lot!

peggy


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