Hi Peggy,

  Is it possible for you to first create the pyramid structures on the
silicon substrate and then deposit BST to create the array you desire.

Phillipe Tabada


>From: "WENYI ZHU" 
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] need help on making pyramid array on the ceramic
>thickfilm
>Date: Mon, 26 Jul 2004 16:17:21 -0400 (EDT)
>
>Dear all,
>I am trying to make some pyramid array on the ceramic thick film about 25
>micrometers to 100 micrometer thick.I found a method  called anisotropic
>etching in KOH can make pyramid cavity on the  <100> single crystal si
>wafer,but my etching object is isotropical ceramics,for example BST(Barium
>strontium titanate).It is a kind of polycrystal material.Is there any other
>method to make these pyramids in such fine scale?
>You will be highly appreciated you if you can give me any suggestions.
>Thanks a lot!
>
>peggy
>
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