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MEMSnet Home: MEMS-Talk: Wet Etch ITO Coated Glass
Wet Etch ITO Coated Glass
2004-07-27
Kinney, Tim Scott (UMC-Student)
2004-08-31
Krueger, Bernd (Unaxis Optics BZ)
2004-08-31
Borski, Justin
Wet Etch ITO Coated Glass
Kinney, Tim Scott (UMC-Student)
2004-07-27
I am interested in wet etching ITO coated glass for a research project I am
involved in.  I am looking specifically for products and a procedure to wet etch
ITO coated float glass.  Since the pattern I will be using does not require high
definition, I will be using a printed transparency as my mask.  I will have
access to spin coating equipment as well.  I have been told the basics, but I
have had a hard time finding specific information about  what kind of resist,
developer, and solvent to use.  Any information will be very helpful and
appreciated.

Thank you,
Tim

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