Sensors and Actuators 77 1999 106¨C112
www.elsevier.nlrlocatersna
Measurement of the effective transverse piezoelectric coefficient e of 31,f
/ AlN and Pb Zr ,Ti O thin films x 1yx 3
Marc-Alexandre Dubois ), Paul Muralt
Laboratoire de Ceramique, Swiss Federal Institute of Technology, DMX-LC
Ecublens, CH-1015 Lausanne, Switzerland ¡ä
Received 7 July 1998; received in revised form 28 December 1998; accepted 15
February 1999
Sensors and Actuators A 107 (2003) 68¨C74
Measurement of transverse piezoelectric properties of PZT thin films
=====================================
There are many papers in the publication such as Sensors and Actuators,IEEE
UFFC...
You can find them by searching in Elsevier or IEL.
Good luck!
======= 2004-08-02 12:46:00 ÄúÔÚÀ´ÐÅÖÐдµÀ£º=======
>I would like to know is there any publication on how to measure PZT
>coefficient (e31)? THANKS!
>
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