For Varian system, there should be a thermo coupler in the chamber
showing the temperature. It would not be the exact temperature, but
should be close.

Good luck,

Hongjun Zeng
Microfabrication Application Laboratory (MAL)
University of Illinois at Chicago
3014 ERF Building, 842 W. Taylor Street
Chicago, IL 60607
Tel. 312-413-5889, Fax: 312-996-6465


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Tan, Chuan Seng
Sent: Tuesday, August 03, 2004 2:30 PM
To: [email protected]
Subject: [mems-talk] e-beam temperature

Hi All,

Does anyone know how to determine the wafers temperature during metal
deposition in an e-beam chamber ?

Thanks for your inputs.

Chuan Seng

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