>When I am doing glass etching, I coated chromium sacrificial layer to
>increase adhesion by sputtering, first. And on this layer, coat photoresist
>1818, develop PR and etch Cr. Then after glass is exposed, start to etching
>glass.
>
>
>
>But, when glass is etching, the edge of sacrificial layer is defected.
>Therefore, the side well of channel is very rough, not smooth.
>
>If someone knows the answer how to increase adhesion between glass and Cr,
>and Cr and photoresist, please let me know.
>
>Thank you.
>
>
>
>Jinkee Lee

What chemistry do you use to etch the glass. My experience is that Soda
lime glass cannot be dry etched cleanly. This has to do with the chemistry
of the glass. You can use Fused Silica glass which would give you clean
profile. I dry etch fused silica without any metal mask.

Pari.