Try Auburn University's microfabrication laboratory.  The lab manager is
Charles Ellis.  His phone number and email address are: (334) 844-1883 and
[email protected]

Robert Dean

At 08:52 AM 11/16/98 -0500, you wrote:
>Hello:
>
>I am looking for a lab that can deposit low temperature PECVD nitride
>on single chips mounted on wafers.  Any recommendations would be
>greatly appreciated.
>
>Regards,
>
>Michael Gaitan
>
>---------
>
>Michael Gaitan, Ph.D.
>Project Leader
>MicroElectroMechanical Systems
>NIST
>Gaithersburg MD 20899
>
>
>
Robert Dean

RF CMOS Designer / Project Manager

MEMS Optical, Inc.
205 Import Circle
Huntsville, AL 35806

(256) 859-1886     Voice
(256) 859-5890     Fax