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MEMSnet Home: MEMS-Talk: LOR stripping while protecting Al
LOR stripping while protecting Al
2004-08-09
Borski, Justin
2004-08-09
William Lanford-Crick
2004-08-10
Paul Monaghan
LOR stripping while protecting Al
Paul Monaghan
2004-08-10
Bill,

You could add some dried molecular sieves to it and make sure the bottle is
well sealed. This should keep you solvent dry. You should be able to get the
sieves from any chemical reagent supplier.

Paul


We've never had trouble with the Acetone; this may be because we have baked
the LOR at 190 degrees.  I am told that acetone can cause some precipitate
in un-baked LOR but we have never experienced any trouble.

The kind folks at Microchem -- which supplies the LOR -- have suggested NMP
also, but warned that I should keep it as dry as possible to avoid etching
the aluminum.  We have a lab which has very poor humidity control--any
thoughts on how to prevent the bottle of NMP from absorbing moisture from
the air?  Or do you think this won't be a problem?

Thanks!
Bill




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