Shweta,

This is probably not what you are looking for, but I'm using a Cl-O2
plasma etch for Chrome over Copper, The copper surface forms a Chloride
which needs to be washed away in a dilute HCl dip but is otherwise
untouched.  It might be worth a shot.

Greg
Boston U.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Shweta Humad
Sent: Tuesday, August 10, 2004 5:58 PM
To: [email protected]
Subject: [mems-talk] Chromium etchant selective to copper


Does anyone know of a chromium etchant selective to copper?

Thanks,
--
Shweta Humad