Silicon wafers are doped during the solidification phase of the boule
manufacturing process. In other words, the concentration of dopant is a bulk
propery of the Si throughout the wafer thickness. So yes, you can grind up
doped wafers and get doped particles. Alternatively, you can buy highly doped
silicon powder from suppliers to the wafer foundry industry.
Neal Ricks
Nanofabrication Lab Manager
Florida International University
Sarah C Mcquaide wrote:
Does anybody know whether anyone manufactures Si wafers that are p- and n-type
doped completely through the total thinkness of the wafer? The thickness of the
wafer does not matter to me; I need to make small (micron-sized) dopes Si
"powder", and thus would like to buy pre-doped wafers to grind up.
Alternatively, has anyone heard of doping micron-sized Si pieces in a furnace,
and whether there are any problems with doing this?
Thanks!
Sarah McQuaide
Research Engineer
University of Washington Genomation Lab
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/