Hi,

Personally, I have been using ABAQUS for years.  In case you have your
own constitutive laws for your coupled field (or sequentially coupled)
analyses, ABAQUS is a good one to use.  You can implement your material
through User MATerial (UMAT) and run your FE simulations.  If you like,
please refer to "ASME J. Electronic Packaging Vol. 120, No. 1, PP24-34"
by Fu et al., regarding the FE procedure.  Good luck.

Chia-Yu Fu

        -----Original Message-----
        From:   ANDERS OLSSON [SMTP:[email protected]]
        Sent:   Monday, November 16, 1998 6:46 AM
        To:     [email protected]
        Subject:        Experience of ADINA?

        Dear Colleagues

        I am currently in the process to decide which simulation tool
our
        organization should use. I know there exist several different
tools
        dedicated for MEMS, but I am also considering more general FEA
        packages.

        I know that ADINA is a well known software package for finite
element
        analysis, but I can not remember I have seen anyone use it for
MEMS.
        If you have any experience of ADINA used for MEMS I would
appreciate
        your response. Especially I am interested to hear about ADINA-F
        (fluid),  but I am also interested to hear about mechanical,
thermal
        and coupled fields.

        Sincerely
        Anders


From ROLAND A. LEVY, DISTINGUISHED PROFESSOR OF PHYSICS, NJIT; TEL.   Wed Nov 18
19:59:20 1998
To: [email protected]
Subject:   RE: Lab for PECVD deposition
From:   "ROLAND A. LEVY, DISTINGUISHED PROFESSOR OF PHYSICS, NJIT; TEL.
Date: Wed Nov 18 19:59:20 1998
Lines: 13

Michael:

I have capabilities for depositing silicon dioxide and silicon nitride by
PECVD. I use an Applied Materials 3300 which offers the capability of
depositing on as many as 24 4" wafers.

Call me if you are interested.


Best regards


Roland Levy