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MEMSnet Home: MEMS-Talk: SOI MEMS - Handle Resistivity
SOI MEMS - Handle Resistivity
2004-08-17
Noel Elman
SOI MEMS - Handle Resistivity
Noel Elman
2004-08-17
Hi Everyone,

Does anyone know typical values of resistivity of the silicon handle for
MEMS applications?

Thanks in advance.

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