Hello all,

  When you send a design for fabrication for fabrication in MUMPS
technology, a regular comb-drive resonator is often fabricated at the
edge of your die as a test structure regardless of your design. This
device is exactly the same as the comb-drive resonator in CaMEL library
available from Cronos (15 40um fingers, 3um gap/width, 150um beams, and
2um thickness).

  I wanted to know if anybody has tested such device and could actually
drive them into observable (optically or electrically) resonance? The
simulated resonant frequency of the device is about 24.7kHz, but I have
been unable to make the device resonate. I am wondering if I am doing
something fundamentally wrong in my experiments.

  I highly appreciate any help, comments, and experiences.

  Thanks,
  Behraad