CR-14 by Transene had some selectivity on our experiments, etching Cr 5
times faster than Cu.
CR-7 actually etched Cu faster than Cr, so don't use that.
See JMEMS etching papers, as reported earlier on this newsgroup.
--Kirt Williams
----- Original Message -----
From: "Shweta Humad"
To:
Sent: Tuesday, August 10, 2004 2:57 PM
Subject: [mems-talk] Chromium etchant selective to copper
> Does anyone know of a chromium etchant selective to copper?
> Thanks,
> Shweta Humad