Hi, Mike -

Have you talked to Brent Mott at NASA-Goddard (in Greenbelt MD)?

Perry Skeath

>Hello:
>
>I am looking for a lab that can deposit low temperature PECVD nitride
>on single chips mounted on wafers.  Any recommendations would be
>greatly appreciated.
>
>Regards,
>
>Michael Gaitan
>
>---------
>
>Michael Gaitan, Ph.D.
>Project Leader
>MicroElectroMechanical Systems
>NIST
>Gaithersburg MD 20899
>