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MEMSnet Home: MEMS-Talk: Re: Lab for PECVD deposition
Re: Lab for PECVD deposition
1998-11-18
Robert Dean
1998-11-18
Michael Young
1998-11-18
Perry Skeath
1998-11-18
Chris Storment
Re: Lab for PECVD deposition
Perry Skeath
1998-11-18
Hi, Mike -

Have you talked to Brent Mott at NASA-Goddard (in Greenbelt MD)?

Perry Skeath

>Hello:
>
>I am looking for a lab that can deposit low temperature PECVD nitride
>on single chips mounted on wafers.  Any recommendations would be
>greatly appreciated.
>
>Regards,
>
>Michael Gaitan
>
>---------
>
>Michael Gaitan, Ph.D.
>Project Leader
>MicroElectroMechanical Systems
>NIST
>Gaithersburg MD 20899
>


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