Hi,

I have adhesion problems of 120um thick and 50um wide SU-8 50 structures on
pyrex.
I have a long dehydration time (at least one hour), a high exposure dose
(600mJ/cm2) and even tried stepwise exposure.
Although I could improve the adhesion some parts still peel of during the
development.
I know, that by increasing the exposure dose I could get better adhesion, but an
unwanted side effect would be rough sidewalls that I try to prevent..

I appreciate any comments!!! Thanks in advance.

Arne

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Arne Schleunitz

MEMS Sensors and Actuators Lab

Department of Electrical and Computer Engineering

University of Maryland

Tel: (301) 405-1897