Dear all,

I'd like to check if there is any way to do patterning onto LSMO ( LCMO )
manganite film. I've come to know RIE would be possible to make manganite
electrodes exclusively, but struggled to find which types of gases and
parameters should be used.
If you let me know any reference paper or information about the process, it
would be wonderful for me, and if there might be different ways to
fabricate manganite patterns without RIE process, please let me know.

Best Regards,

Suyong