Hi all,



I deposited Si on glass using PECVD, but I am wondering it is really Si or
Si nitride.

Our Silane source is 2% SiH4 mixed with N2. So, I supplied SiH4 and N2.

With my deposition, the color was yellow with thin layer and getting red
with thick layer.



If someone has a same experience, please let me know.

Thanks



Jinkee Lee

Brown Univeristy, Division of Engineering

Ph.D. student@Microfluidics Lab, Tripathi Group.