Hi Raegan,

Try [1g KOH: 10g K3Fe(CN)6: 100ml DI water].  I believe this is what we used
at Berkeley to etch Al without attacking ZnO.  You might search on
http://microlab.berkeley.edu for more details.  Another option might be to
use lift-off instead of etch.  Good luck.


Marc Straub, Engineering Design Manager
Solidus Technologies, Inc.
Colorado Springs, CO  USA


-----Original Message-----
From: Raegan Johnson [mailto:[email protected]]
Sent: Sunday, August 29, 2004 12:51 PM
To: [email protected]
Subject: [mems-talk] wet etch that etches Al but not ZnO

Does anyone know of a wet etch solution that will etch aluminum but not ZnO?


thanks,
Raegan