Hello Tim,

Once I have tried etching ITO on Glas with NH4HF2 and it works, but the Glas
will also etched. Unfortunately the etched regions on the substrate became
matt.

Bernd Krueger

-----Ursprüngliche Nachricht-----
Von: [email protected]
[mailto:[email protected]]Im Auftrag von Kinney, Tim Scott
(UMC-Student)
Gesendet am: Dienstag, 27. Juli 2004 04:52
An: [email protected]
Betreff: [mems-talk] Wet Etch ITO Coated Glass

I am interested in wet etching ITO coated glass for a research project I am
involved in.  I am looking specifically for products and a procedure to wet
etch ITO coated float glass.  Since the pattern I will be using does not
require high definition, I will be using a printed transparency as my mask.
I will have access to spin coating equipment as well.  I have been told the
basics, but I have had a hard time finding specific information about  what
kind of resist, developer, and solvent to use.  Any information will be very
helpful and appreciated.

Thank you,
Tim
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