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MEMSnet Home: MEMS-Talk: ITO etchat wich is selective to Aluminium
ITO etchat wich is selective to Aluminium
2004-08-31
Shelegeda Evgeny
2004-08-31
Bill Moffat
ITO etchat wich is selective to Aluminium
Shelegeda Evgeny
2004-08-31
I need to etch ITO thin films in a photolithography process of
fabricating a semiconductor device.

The main task of this photolithography process is to etch ITO film but
not to etch an Al film which is under the ITO film.
So I need the ITO etchant which is highly selective to Al.


Best regards,
Shelegeda Eugenie
Research Assistant
P.N. Lebedev Physical Institute
Moscow, Russia


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