The fact that you have nitrogen present during the deposition certainly
means that you will have certain mixture of it in the film. How much you
don't know unless you do some kind of spectral analysis. Why not use
pure silane?

Elina

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Jinkee Lee
Sent: Monday, August 30, 2004 8:11 PM
To: [email protected]
Subject: [mems-talk] The color of poly or amorphous silicon deposited
PECVD?


Hi all,



I deposited Si on glass using PECVD, but I am wondering it is really Si
or Si nitride.

Our Silane source is 2% SiH4 mixed with N2. So, I supplied SiH4 and N2.

With my deposition, the color was yellow with thin layer and getting red
with thick layer.



If someone has a same experience, please let me know.

Thanks



Jinkee Lee

Brown Univeristy, Division of Engineering

Ph.D. student@Microfluidics Lab, Tripathi Group.

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