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MEMSnet Home: MEMS-Talk: adhesion between Si wafer and gold film
adhesion between Si wafer and gold film
2004-08-31
Chen-Han Lee
2004-08-31
Anthony Cooper
2004-08-31
Michael Cooke
2004-08-31
Flavio Giacomozzi
2004-09-01
vijay j
2004-08-31
Kasman , Elina
2004-08-31
[email protected]
adhesion between Si wafer and gold film
Anthony Cooper
2004-08-31
Dear all,

could anyone help me please.
I am doing some electroplating using SU-8 mould.
gold is evaporated before SU-8 is deposited.
after the developing step,
many SU-8 parts fall off of the wafer with gold film attached to them,
how do i improve the adhesion between Si and the gold film,
so that i have a a complete patterned wafer??

thanks for the help.

Chen han

Derek
Try depositing a thin layer of Chrome before depositing the gold.




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