Hi Jinkee,

   From your discription, you are most likely depositing poly.  However, the
easiest way to determine which if it is poly or silicon nitride is by
dipping one of your wafers in KOH.  If the layer etches away, you have poly.
  If not, you have silicon nitride.

Phillipe Tabada


>From: "Jinkee Lee" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] The color of poly or amorphous silicon deposited
>PECVD?
>Date: Mon, 30 Aug 2004 21:10:51 -0400
>
>Hi all,
>
>
>
>I deposited Si on glass using PECVD, but I am wondering it is really Si or
>Si nitride.
>
>Our Silane source is 2% SiH4 mixed with N2. So, I supplied SiH4 and N2.
>
>With my deposition, the color was yellow with thin layer and getting red
>with thick layer.
>
>
>
>If someone has a same experience, please let me know.
>
>Thanks
>
>
>
>Jinkee Lee
>
>Brown Univeristy, Division of Engineering
>
>Ph.D. student@Microfluidics Lab, Tripathi Group.
>
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