Dear MEMS researcher,


I wish to coat several polymer solutions on the silicon substrate
by spin coater.  It is to make a research for the measurement of thermal
conductivity of thin polymer film.

The thickness is 2 micro m, 200 nm, 20 nm for each film.

The polymer films are poly(ethylene terephthalate), polycarbonate, and PMMA.

Does anybody know what kind of solvent is proper for each polymer, and what
concentration is proper for those thickness?

Thank you very much.
Sincerely

Ickchan Kim


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Ickchan Kim                              Office Phone: (979)845-9598
[email protected]                           C.P.#       : (979)574-4179

Office: ENPH #401, Conduction Heat Transfer Lab.
        Department of Mechanical Engineering, Texas A&M University
        College Station, Texas 77843-3123