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MEMSnet Home: MEMS-Talk: adhesion between Si wafer and gold film
adhesion between Si wafer and gold film
2004-08-31
Chen-Han Lee
2004-08-31
Anthony Cooper
2004-08-31
Michael Cooke
2004-08-31
Flavio Giacomozzi
2004-09-01
vijay j
2004-08-31
Kasman , Elina
2004-08-31
[email protected]
adhesion between Si wafer and gold film
vijay j
2004-09-01
hai,


   Since the surface free energy of gold will not match with silicon thats why
adhesion is poor. use the chromium as barrier between gold and silicon.....


bye,
regards,
vijay.

Chen-Han Lee  wrote:



Dear all,

could anyone help me please.
I am doing some electroplating using SU-8 mould.
gold is evaporated before SU-8 is deposited.
after the developing step,
many SU-8 parts fall off of the wafer with gold film attached to them,
how do i improve the adhesion between Si and the gold film,
so that i have a a complete patterned wafer??

thanks for the help.

Chen han

///////////////////////////////////
Chen-Han Lee
Research Student
School of Manufacturing and Mechanical Engineering,
University of Birmingham,
Birmingham, B15 2TT
United Kingdom,
Phone : +44 121 4144245
Fax : +44 121 4143958
E-Mail : [email protected]
///////////////////////////////////


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