Hi Jinkee,

You can find data on the interference color of Si3N4-Films on Si here:
http://www.opticsexpress.org/abstract.cfm?URI=OPEX-12-7-1464
To check if your films are stoichiometric Si3N4 you may try a thickness
variation.

Harald

_________________________________________________________

CSEM SA
Dr. Harald Walter                     Senior R&D Engineer
Photonics Division                   Optical Microsystems

Badenerstrasse 569                         CH-8048 Zürich
Phone: +41 1 497 14 82               Fax: +41 1 497 14 00
_________________________________________________________



> Hi all,
>
> I deposited Si on glass using PECVD, but I am wondering it is
> really Si or Si nitride.
>
> Our Silane source is 2% SiH4 mixed with N2. So, I supplied
> SiH4 and N2.
>
> With my deposition, the color was yellow with thin layer and
> getting red with thick layer.
>
> If someone has a same experience, please let me know.
>
> Thanks