Your layer should be a-Si:H. a-SiNx:H is mostly transparent with only
slight yellow or pink color in 1-um thickness. With the same thickness,
a-Si:H will appear brown and even with slight reflective silver color. And
with 50-nm thickness, it will look yellow.


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic


On Mon, 30 Aug 2004, Jinkee Lee wrote:

> Hi all,
>
>
>
> I deposited Si on glass using PECVD, but I am wondering it is really Si or
> Si nitride.
>
> Our Silane source is 2% SiH4 mixed with N2. So, I supplied SiH4 and N2.
>
> With my deposition, the color was yellow with thin layer and getting red
> with thick layer.
>
>
>
> If someone has a same experience, please let me know.
>
> Thanks
>
>
>
> Jinkee Lee
>
> Brown Univeristy, Division of Engineering
>
> Ph.D. student@Microfluidics Lab, Tripathi Group.
>
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