See the "CRC Handbook of Metal Etchants", edited by Walker and Tarn from the
CRC press, pages 1247-1249.  According to the book, it's very difficult to
etch.

One etch is 1:5 HCL:H20, using the SnO as an anode, although they claim this
to be a poorly controlled etch.

Many of the etches involve HBr, which is VERY dangerous stuff, and should
only be used by someone familiar with it.

Ion milling or other physical process may be a better bet than wet etching,
if available.  But check out the book, it's a great one to have in any
event.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of [email protected]
Sent: Thursday, August 26, 2004 11:53 PM
To: [email protected]
Cc: [email protected]
Subject: [mems-talk] Tin Oxide Etching Process







Hi !!!!!!!

Please Suggest me the Chemicals and Wet Etching Process For Tin Oxide
Coated Glass. My glass Plate size is
1200 mm x 700 mm and Sputter Coated Tin oxide Thickness is 1.6 Micron.

Nadig Pranesh

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