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MEMSnet Home: MEMS-Talk: SU-8 processing on glass
SU-8 processing on glass
2004-09-08
Krishna Vummidi
2004-09-09
de la Fuente, Pablo
SU-8 processing on glass
Krishna Vummidi
2004-09-08
Hi,
I'm an a look out for SU-8 (2025) processing of normal glass slides. Would
appreciate if anyone has processing tips, suggestions and variaitons in recipe
from that of Si (given by micro-chem). thanks, krishna
reply
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