Does your mask make a good contact with the samples? I had this problem when
my samples had edge bead. It sounds like also underexposed.

Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K 2R1
   CANADA
   [email protected]
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein


----- Original Message -----
From: "suscarl" 
To: 
Sent: Wednesday, September 08, 2004 11:15 AM
Subject: [mems-talk] unwanted tapering of SU-8 structures


> Need advice from SU-8 experts:
> I have 30um width by 55um height SU-8 2035 lines. Somehow, after 35s
exposure time and post-bake of 95oC for 20min, the resulting structures are
tapered with bottom 60um width and top 40um width. Can anyone offer possible
solutions to troubleshoot the problem?
>
> Thanks!!
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