Do you happen to be using an i-line filter?  A broadband exposure tends to
cause features to be less defined using SU-8 as you have described, making
use of a 365nm i-line filter necessary.

Jeff Babinski
Process Engineer
Microfabrication Solutions

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of suscarl
Sent: Wednesday, September 08, 2004 11:15 AM
To: [email protected]
Subject: [mems-talk] unwanted tapering of SU-8 structures


Need advice from SU-8 experts:
I have 30um width by 55um height SU-8 2035 lines. Somehow, after 35s
exposure time and post-bake of 95oC for 20min, the resulting structures are
tapered with bottom 60um width and top 40um width. Can anyone offer possible
solutions to troubleshoot the problem?

Thanks!!
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