Hi Laleh

What kind of etch are you trying to do. If it is an isotropic etch then xenon
difluoride will etch Mo at around 1um to 2um a minute in surface micromachining
applications. W may also etch in XeF2 but it is very variable and will be much
slower.

David Springer
XACTIX, Inc
www.xactix.com

>>  I need to etch W and Mo films, What are the best etchants which can be
 >>  used in
 >>  1-2 Micron resolution?

 >>  Laleh Rabieirad

 >>  ECE Department
 >>  Purdue University
 >>  _______________________________________________
 >>  [email protected] mailing list: to unsubscribe or change your list
 >>  options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
 >>  Hosted by the MEMS Exchange, providers of MEMS processing services.
 >>  Visit us at http://www.memsnet.org/