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MEMSnet Home: MEMS-Talk: Sputtering titanium on ceramic
Sputtering titanium on ceramic
2004-09-14
Alain
2004-09-15
Gary
2004-09-16
MT Klaus Beschorner
2004-09-16
Alain
Sputtering titanium on ceramic
Alain
2004-09-14
Hi all
Has anyone sputtered titanium on a ceramic type material (we are using Macor)?
We have had good adhesion of titanium on ceramic but when other layers are added
(cu and nickel in that order), it peels off. Any literature on a similar process
anyone knows of or has experience with?
Thanks
Alain

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