Hi, everybody, I had a problem in BCl3 etching on Si today.
When the purge after etching lasted for  40s ( which is supposed to be 2 min),
it stopped for some reason and we had no choice but to end the process.
But after we took out the sample, the surface looks yellowish, and become quite
conductive.
Did any body have similair problem before, do you know how to get rid of the
yellow stuff?The recipe we used is BCl3 50,, Cl2 50, O2 3.
THanks.

Maggie




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