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MEMSnet Home: MEMS-Talk: Regd Si Wafer Placing in KOH to Produce V-groove
Regd Si Wafer Placing in KOH to Produce V-groove
2004-09-16
Dhanamjaya Guda
2004-09-17
Eugenie Shelegeda
2004-09-17
Kevin Campbell
2004-09-17
koshy
Regd Si Wafer Placing in KOH to Produce V-groove
Eugenie Shelegeda
2004-09-17
Just put it in the etchant:)))))

Geometry of an etching pit in a orientation-dependent etching of Si
depends on 2 things only:

1. Crystal orientation of Si-wafer (e.g. 100 or 111)
2. Solution of the etchsnt

Eugenie Shelegeda
*********************************************

Hi,

  I am  trying to produce v-groove on Si using KOH. Could any one please
tell me how to place the Si wafer (either verical or horizontal i.e just
dropping the wafer in the solution) in the KOH solution and also could
you please give me particular reasons for choosing the one. I would
really appreciate if any one could reply to this mail as soon as
possible.

Thanks,
Dhanamjaya R Guda


reply
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