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MEMSnet Home: MEMS-Talk: magic touch chrome etch
magic touch chrome etch
2004-09-22
[email protected]
magic touch chrome etch
[email protected]
2004-09-22
Hi,
     I am trying to etch chrome using the aluminum magic touch and HCl and
haven't succeeded.
    The cr I am trying to get rid of is 50A evaporated on to Pyrex. I want to
selectively etch chrome and keep the copper on top.
   I have tried 10% and 3.7% HCl. I tried leave an aluminum shot on the wafer
and also writing aluminum lines on the wafer, and tried touching the cr with a
tight roll of aluminum sheet. I could see small clear areas etched around the al
lines and also around the areas touched by the al roll. Nothing happened at all
for the aluminum shot placed on the chrome.
   Can anybody please help?
   Thanks.

Jack


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