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MEMSnet Home: MEMS-Talk: Al etch
Al etch
2004-09-23
Hunter, Luke L
Silicon Nitride mechanical
2004-09-24
rakesh babu
Al etch
Hunter, Luke L
2004-09-23
Hello all,

Does anyone know of a good Al etch, dry or wet, that will have little to
no attack on Cu?

Thanks

reply
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