If you find a solution, let me know. I was looking for wet etch of LPCVD Si3N4
and didn't find anything except for straigt HF.



-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Sampo Tuukkanen
Sent: Thursday, September 23, 2004 10:12 AM
To: MemsTalk
Subject: [mems-talk] Wet etching of silicon nitride?


Hi,

I would like to wet etch Si3N4 (LPCVD) to prevent the damages of silicon surface
during RIE. BHF seems to be quite slow to that.


Best regards,

Sampo Tuukkanen, NanoScience Center, Jyväskylä.

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