In my experience, Piranha does not attack gold.  Are you using a
titanium adhesion layer?  If so, the Piranha will dissolve the Ti and
the Au will fall off. In this case Cr will provide a more chemically
resistant adhesion layer

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Edward Keough
Sent: Thursday, September 23, 2004 3:17 PM
To: mems-talk
Subject: [mems-talk] Piranah effect on Au

Hello,

Does anyone have any information on piranah's (30% H2O2 : 70% H2SO4)
effect on a 100nm Au layer on silica. Piranah is volently active, it
completely removes my Au layer, but I have seen in literature it can be
used to clean Au. I am trying to drive off organic contaminants and
make my silica hydrophilic using piranha solution while keeping my Au
layer in some areas.

I appreciate any information, thank you.

Ed Keough
Drexel University
Biomedical Engineering
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