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MEMSnet Home: MEMS-Talk: Diced wafer cleaning options
Diced wafer cleaning options
2004-09-22
Markus Lohi
2004-09-27
NANO-MASTER, Inc.
2004-09-22
Kasman , Elina
2004-09-24
Reuter, Markus
Diced wafer cleaning options
NANO-MASTER, Inc.
2004-09-27
Hi all,

I am looking into different wafer cleaning options for diced silicon
wafers.
Could somebody advise me with the most usual methods/equipment and their
pros
and cons? We need a cheap process for low volume washing. The wafer is
mounted
on an adhesive tape.

Thanks,
Markus
_______________________________________________

Dear Markus,

We can help you; you need a non contact cleaning technique and there are
tools to do that. Please contact me either with e-mail
[email protected] or by phone 512 385 4552.

Best Regards,

Birol Kuyel, Ph.D.



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