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MEMSnet Home: MEMS-Talk: sputter materials on Si02
sputter materials on Si02
2004-09-28
Federico
RIE Etching of Alumina
2004-09-28
Eric Zimney
2004-09-28
Brent Garber (2 parts)
2004-09-28
Kirt Williams
2004-09-29
Bruno Wacogne
sputter materials on Si02
Bruno Wacogne
2004-09-29
Hi Federico,

For example, you can use Ti or Cr which are usually used as adhesion layers
for coating silica with gold.

Good luck,

Bruno

At 10:35 28/09/2004 +0000, you wrote:
>Hi everybody
>
>There is anyone that could tell me which materials have the best adhesion
>properties for sputter on SiO2?
>
>thanks
>Federico
>
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